METHOD FOR FABRICATING BUTTABLE EPITAXIAL INFRARED DETECTOR ARRAYS BY DIMENSIONALLY CONTROLLED CLEAVING OF SINGLE CRYSTAL SUBSTRATES
Assignee
HONEYWELL INC., A CORP. OF DE
Filed
Dec 4, 1989
Granted
Mar 30, 1993
Location
LEXINGTON MA US
Abstract
This invention provides a method for fabricating buttable infrared detector arrays by dimensionally controlled cleaving of a single crystal wafer substrate having well defined cleavage planes. The single crystal wafer substrate is first cleaved along its natural cleavage planes so as to form a plurality of cleavage lines defining rectangular detector array regions. A layer of infrared sensitive material is epitaxially grown on the cleaved single crystal wafer substrate. Infrared detector arrays are fabricated on the layer of infrared sensitive material within the rectangular detector array regions defined by the cleavage lines on the single crystal wafer substrate. The fabricated infrared detector arrays are then separated at the cleavage lines so as to form individual buttable infrared detector arrays.
Source: Google Patents
35 USC §181 Secrecy Order
Imposed
May 3, 1990
Rescinded
Mar 2, 1992
Duration
1 year, 10 months
Inventor
- 1PETER H. ZIMMERMAN
Record Details
- Patent number
- US 5198069
- Application
- 00744503
- Aerospace match
- Yes
- Dataset source
- 35 USC §181 SO records
Browse by Assignee
HONEYWELL INC., A CORP. OF DEMore from this assignee
FIBER OPTIC GYROSCOPE REFRACTIVE INDEX INDUCED ERROR COMPENSATION
HONEYWELL INC., A CORP. OF DE
HIGH DOPPLER RATE, HIGH ALTITUDE CAPABILITY COHERENT PULSE DOPPLER RADAR ALTIMETER
HONEYWELL INC., A CORP. OF DE
CARTRIDGE CASE FOR A CASED TELESCOPED AMMUNITION ROUND
HONEYWELL INC., A CORP. OF DE
MICROSTRUCTURE DESIGN FOR HIGH IR SENSITIVITY
HONEYWELL INC., A CORP. OF DE
PASSIVE RING RESONATOR GYRO WITH POLARIZATION ROTATING RING PATH
HONEYWELL INC., A CORP. OF DE
DITHER SIGNAL REMOVER FOR A DITHERED RING LASER ANGULAR RATE SENSOR UTILIZING AN ADAPTIVE DIGITAL FILTER
HONEYWELL INC., A CORP. OF DE
Related by domain
AIRBORNE RADAR JAMMING SYSTEM
BOEING, COMPANY, THE
METHOD AND APPARATUS FOR THE DETECTION OF OBJECTS USING ELECTROMAGNETIC WAVE ATTENUATION PATTERNS
JG TECHNOLOGIES LLC
DUAL INFRARED BAND OBJECTIVE LENS
OPTICAL NIGHT VISION DEVICE WITH STANDARD LIGHT INTENSIFIER
THOMSON-CSF SEXTANT
MULTIPLE INFRARED MISSILE JAMMER
LOCKHEED SANDERS INC, A DELAWARE CORPORATION
BANDGAP RADIATION DETECTOR