US 5370458
MONOLITHIC MICROWAVE POWER SENSOR
Assignee
LOCKHEED SANDERS, INC, A CORP. OF DE
Filed
Oct 9, 1990
Granted
Dec 6, 1994
Location
CARLISLE MA US
Abstract
A monolithic integrated circuit power sensor provides a monolithic integrated circuit substrate a conversion element formed either on or in the substrate for converting microwave energy into heat, an electrically insulating dielectric layer affixed to the conversion element, and an integrated circuit, heat sensitive element formed in sufficiently close proximity to the conversion element to be thermally coupled thereto through the dielectric layer for sensing temperature changes in the conversion element.
Source: Google Patents
35 USC §181 Secrecy Order
Imposed
May 22, 1991
Rescinded
Jun 3, 1994
Duration
3 years
Inventor
- 1MILES E. GOFF
Record Details
- Patent number
- US 5370458
- Application
- 07595067
- Aerospace match
- No
- Dataset source
- 35 USC §181 SO records
Browse by Assignee
LOCKHEED SANDERS, INC, A CORP. OF DEBack to patent indexSource: USPTO 35 USC §181 secrecy order records