MONOLITHIC QUARTZ RESONATOR ACCELEROMETER
Assignee
Charles Stark Draper Lab
Filed as: CHARLES STARK DRAPER LABORATORY, INC., THE
Filed
Feb 28, 1989
Granted
May 31, 1994
Location
Cambridge MA (Draper Lab/MIT)
Abstract
A monolithic quartz resonator accelerometer including a monolithic quartz sensing structure with a frame, a proof mass support structure within the frame, and a resonator structure interconnecting the frame and the support structure. Further included are a proof mass fixed to the support structure, and electrodes on the resonator structure for driving the resonator at a vibration frequency which varies as a function of the acceleration of the proof mass.
Source: Google Patents
35 USC §181 Secrecy Order
Imposed
Sep 22, 1989
Rescinded
Nov 9, 1993
Duration
4 years, 1 month
Inventor
- 1ANTHONY PETROVICH
Sensitive facility: Cambridge MA (Draper Lab/MIT)
Record Details
- Patent number
- US 5315874
- Application
- 07316873
- Aerospace match
- No
- Dataset source
- 35 USC §181 SO records
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