MONOLITHIC FOCAL PLANE ARRAY
Assignee
GRUMMAN CORPORATION
Filed
Sep 25, 1989
Granted
May 24, 1994
Location
Bethpage NY (Grumman)
Abstract
An integrated circuit wafer is formed as a monolithic focal plane array having signal processing circuitry formed upon a first surface thereof and infrared detector elements formed upon a second surface thereof. A process for forming the same is also disclosed. The wafer has an array of waffle-like hollows formed upon one surface. The floor of each hollow has a dense array of small diameter vias formed thereon. The vias extend through the wafer to the second surface thereof. Conductive conduits are formed through the hollows and vias to connect infrared detectors on the second side of the wafer to their associated signal processing circuitry formed upon the first side of the wafer.
Source: Google Patents
35 USC §181 Secrecy Order
Imposed
Apr 19, 1990
Rescinded
Aug 24, 1992
Duration
2 years, 4 months
Inventor
- 1ALLEN L. SOLOMON
Sensitive facility: Bethpage NY (Grumman)
Record Details
- Patent number
- US 5315147
- Application
- 07412161
- Aerospace match
- Yes
- Dataset source
- 35 USC §181 SO records
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