Research/Patents/US 5315147
US 5315147

MONOLITHIC FOCAL PLANE ARRAY

Assignee

GRUMMAN CORPORATION

Filed

Sep 25, 1989

Granted

May 24, 1994

Location

Bethpage NY (Grumman)

Abstract

An integrated circuit wafer is formed as a monolithic focal plane array having signal processing circuitry formed upon a first surface thereof and infrared detector elements formed upon a second surface thereof. A process for forming the same is also disclosed. The wafer has an array of waffle-like hollows formed upon one surface. The floor of each hollow has a dense array of small diameter vias formed thereon. The vias extend through the wafer to the second surface thereof. Conductive conduits are formed through the hollows and vias to connect infrared detectors on the second side of the wafer to their associated signal processing circuitry formed upon the first side of the wafer.

Source: Google Patents

35 USC §181 Secrecy Order

Imposed

Apr 19, 1990

Rescinded

Aug 24, 1992

Duration

2 years, 4 months

Inventor

  • 1ALLEN L. SOLOMON

Sensitive facility: Bethpage NY (Grumman)

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Back to patent indexSource: USPTO 35 USC §181 secrecy order records