Research/Patents/US 5114826
US 5114826

PHOTOSENSITIVE POLYIMIDE COMPOSITIONS

Assignee

INTERNATIONAL BUSINESS MACHINES CORPORATION, A CORP. OF NY

Filed

Dec 28, 1989

Granted

May 19, 1992

Location

WAPPINGERS FALL NY US

Abstract

New photosensitive polyimide compositions and processes of using the same in the fabrication of electronic components are provided. These compositions are comprised of ##STR1## containing polyamic acids and/or the corresponding hydroxy-polyamic esters, or hydroxypolyimides and a photoactive component as an additive or as covalently bonded functionality on the polymer chain. These compositions provide positive or negative patterning options and may be used as conventional resist materials, as imageable dielectric or passivating layers, as high Tg ion implant masks or as imageable lift-off layers in the fabrication of multilevel metal structures.

Source: Google Patents

35 USC §181 Secrecy Order

Imposed

Apr 20, 1990

Rescinded

May 18, 1991

Duration

1 year

Inventor

  • 1RANEE WAI-LING KWONG

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Back to patent indexSource: USPTO 35 USC §181 secrecy order records