US 4969032
MONOLITHIC MICROWAVE INTEGRATED CIRCUIT HAVING VERTICALLY STACKED COMPONENTS
Assignee
MOTOROLA, INC., SCHAUMBURG, ILLINOIS, A CORP. OF DE.
Filed
Jul 18, 1988
Granted
Nov 6, 1990
Location
CHANDLER AZ US
Abstract
A monolithic microwave integrated circuit having multiple, vetically stacked components wherein at least three metal layers isolated from each other by layers of non-conducting material are formed on a semi-insulating substrate, generally comprised of gallium arsenide. Vertically stacked capacitors, inductors and various combinations thereof may be fabricated using the present invention. Further, the vetrically stacked components may be formed on active devices such as FETs and diodies.
Source: Google Patents
35 USC §181 Secrecy Order
Imposed
Apr 13, 1989
Rescinded
Apr 5, 1990
Duration
11 months
Inventor
- 1DOUGLAS G. SCHEITLIN
Record Details
- Patent number
- US 4969032
- Application
- 07220279
- Aerospace match
- No
- Dataset source
- 35 USC §181 SO records
Browse by Assignee
MOTOROLA, INC., SCHAUMBURG, ILLINOIS, A CORP. OF DE.Back to patent indexSource: USPTO 35 USC §181 secrecy order records