LIGHT INDUCED PRODUCTION OF ULTRAFINE POWDERS COMPRISING METAL SILICIDE POWDER
Assignee
ALLIED-SIGNAL INC., A CORP. OF DE
Filed
Aug 15, 1985
Granted
Oct 11, 1988
Location
MADISON NJ US
Abstract
A method of producing ultrafine powders comprising metal silicide powder and the products produced by the method are disclosed. The ultrafine powders comprising metal silicide powders are ideally suited to form stable colloidal suspensions which are used in the production of conductive metal silicide containing films. The process employs gaseous reactants comprising a metal halide and a silicon-containing compound. The reactants are exposed to high intensity light to produce ultrafine powders. In addition to the production of metal silicide powders, the ultrafine powders may also include silicon powder and metal subhalide powder. The ultrafine powders are particularly suited for use in VLSI and VVLSI production.
Source: Google Patents
35 USC §181 Secrecy Order
Imposed
Apr 22, 1986
Rescinded
Oct 10, 1986
Duration
5 months
Inventor
- 1ARUNAVA GUPTA
Record Details
- Patent number
- US 4776937
- Application
- 06765638
- Aerospace match
- No
- Dataset source
- 35 USC §181 SO records
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