Research/Patents/US 4776937
US 4776937

LIGHT INDUCED PRODUCTION OF ULTRAFINE POWDERS COMPRISING METAL SILICIDE POWDER

Assignee

ALLIED-SIGNAL INC., A CORP. OF DE

Filed

Aug 15, 1985

Granted

Oct 11, 1988

Location

MADISON NJ US

Abstract

A method of producing ultrafine powders comprising metal silicide powder and the products produced by the method are disclosed. The ultrafine powders comprising metal silicide powders are ideally suited to form stable colloidal suspensions which are used in the production of conductive metal silicide containing films. The process employs gaseous reactants comprising a metal halide and a silicon-containing compound. The reactants are exposed to high intensity light to produce ultrafine powders. In addition to the production of metal silicide powders, the ultrafine powders may also include silicon powder and metal subhalide powder. The ultrafine powders are particularly suited for use in VLSI and VVLSI production.

Source: Google Patents

35 USC §181 Secrecy Order

Imposed

Apr 22, 1986

Rescinded

Oct 10, 1986

Duration

5 months

Inventor

  • 1ARUNAVA GUPTA
Back to patent indexSource: USPTO 35 USC §181 secrecy order records